METAL-ION SOURCE USING RF DISCHARGE COMBINED WITH SPUTTERING

被引：11

作者：

SAITO, Y

MITSUOKA, Y

SUGANOMATA, S

机构：

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1984年 / 55卷 / 11期

关键词：

D O I：

10.1063/1.1137672

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：1760 / 1762

页数：3

共 9 条

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[7] ON SOME PROPERTIES OF THE RADIO FREQUENCY ION SOURCE WITH LONGITUDINAL MAGNETIC FIELD [J].

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NUCLEAR INSTRUMENTS & METHODS, 1959, 5 (02) :90-94

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[9]

SIMIZU K, 1972, JPN J APPL PHYS, V11, P1192

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