POTENTIAL PROFILING ACROSS SEMICONDUCTOR JUNCTIONS BY AUGER-ELECTRON SPECTROSCOPY IN SCANNING ELECTRON-MICROSCOPE

被引：10

作者：

WALDROP, JR ^{[1
]}

HARRIS, JS ^{[1
]}

机构：

[1] ROCKWELL INT,SCI CTR,THOUSAND OAKS,CA 91360

来源：

JOURNAL OF APPLIED PHYSICS | 1975年 / 46卷 / 12期

关键词：

D O I：

10.1063/1.321587

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：5214 / 5217

页数：4

共 14 条

[1]

EVERHART TE, 1958, THESIS CAMBRIDGE U

[2] VOLTAGE CONTRAST LINEARIZATION WITH A HEMISPHERICAL RETARDING ANALYZER [J].

FENTEM, PJ ;

GOPINATH, A .

JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1974, 7 (11) :930-933

[3] IMPROVED TECHNIQUE FOR VOLTAGE MEASUREMENT USING SCANNING-ELECTRON MICROSCOPE [J].

FLEMMING, JP ;

WARD, EW .

ELECTRONICS LETTERS, 1970, 6 (01) :7-&

[4]

Gallon T. E., 1972, Review of Physics in Technology, V3, P31, DOI 10.1088/0034-6683/3/1/I02

[5] ANALYSIS OF MATERIALS BY ELECTRON-EXCITED AUGER ELECTRONS [J].

HARRIS, LA .

JOURNAL OF APPLIED PHYSICS, 1968, 39 (03) :1419-&

[6]

MacDonald N. C., 1970, Applied Physics Letters, V16, P76, DOI 10.1063/1.1653107

[7] AUGER ELECTRON SPECTROSCOPY IN SCANNING ELECTRON MICROSCOPE - AUGER ELECTRON IMAGES [J].

MACDONALD, NC ;

WALDROP, JR .

APPLIED PHYSICS LETTERS, 1971, 19 (09) :315-+

[8]

Oatley C.W., 1957, J ELECTRON CONTR, V2, P568

[9]

OATLEY CW, 1972, SCANNING ELECTRON MI

[10] HIGH SENSITIVITY AUGER ELECTRON SPECTROMETER [J].

PALMBERG, PW ;

BOHN, GK ;

TRACY, JC .

APPLIED PHYSICS LETTERS, 1969, 15 (08) :254-&

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