SURFACE DAMAGE OF SINGLE-CRYSTAL SILICON ABRADED IN ETHANOL AND DEIONIZED WATER

被引：8

作者：

LIM, DS

DANYLUK, S

机构：

[1] Univ of Illinois at Chicago, Dep of, Civil Engineering, Mechanics &, Metallurgy, Chicago, IL, USA, Univ of Illinois at Chicago, Dep of Civil Engineering, Mechanics & Metallurgy, Chicago, IL, USA

来源：

JOURNAL OF MATERIALS SCIENCE | 1985年 / 20卷 / 11期

关键词：

D O I：

10.1007/BF00552402

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：4084 / 4090

页数：7

共 16 条

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