RESISTIVITY AND CHANNELING STUDIES OF ION-IMPLANTED NIP AND COP SYSTEMS

被引:5
作者
THOME, L [1 ]
MENDOZAZELIS, L [1 ]
BROSSARD, L [1 ]
KROLAS, K [1 ]
COHEN, C [1 ]
CHAUMONT, J [1 ]
BERNAS, H [1 ]
机构
[1] UNIV PARIS 7,ECOLE NORM SUPER,PHYS SOLIDES GRP,F-75005 PARIS,FRANCE
来源
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH | 1982年 / 199卷 / 1-2期
关键词
Compilation and indexing terms; Copyright 2025 Elsevier Inc;
D O I
10.1016/0167-5087(82)90249-6
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
Electric properties
引用
收藏
页码:437 / 440
页数:4
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