A NEW THIN-FILM HUMIDITY MICROSENSOR

被引：19

作者：

CHEN, SN

RAMAKRISHNAN, ES

HUANG, RS

GRANNEMANN, WW

机构：

来源：

IEEE ELECTRON DEVICE LETTERS | 1984年 / 5卷 / 11期

关键词：

D O I：

10.1109/EDL.1984.25984

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：452 / 453

页数：2

共 12 条

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[4]

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[7]

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[9] THIN FERROELECTRIC-FILMS OF BATIO3 ON DOPED SILICON [J].

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[10] USE OF BATIO3 AS A SOLID-ELECTROLYTE TO DETERMINE WATER-VAPOR EFFECTS UPON ELECTRICAL TRANSPORT MECHANISMS [J].

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