PROPERTIES OF MIXED COMPOSITION SI/ZNSE AND ZNSE/LAF3 INFRARED OPTICAL THIN-FILMS

被引：7

作者：

GLUCK, NS

TABER, DB

HEUER, JP

HALL, RL

GUNNING, WJ

机构：

[1] Rockwell International Science Center, Thousand Oaks, CA, 91360

来源：

APPLIED OPTICS | 1992年 / 31卷 / 28期

关键词：

OPTICAL THIN FILMS; INFRARED OPTICS; CODEPOSITED THIN FILMS;

D O I：

10.1364/AO.31.006127

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The behavior of codeposited thin films of ZnSe/LaF3 and Si/ZnSe has been investigated. Mixed ZnSe/LaF3 films are polycrystalline with intermediate compositions with moderately high compressive stress (1500-2000 kg/cm2). Mixed Si/ZnSe films are amorphous; with intermediate compositions with low compressive stress (< 1000 kg/cm2). Optical properties of the ZnSe/LaF3 system vary monotonically with composition, but those of the Si/ZnSe system do not, which is explained by the possible chemical reaction of the two species.

引用

页码：6127 / 6132

页数：6

共 16 条

[1]

[Anonymous], 1993, ELEMENTS XRAY DIFFRA

[2] MICROSTRUCTURE OF DIELECTRIC THIN-FILMS FORMED BY E-BEAM CO-EVAPORATION [J].