AUTOMATIC PROCESS-CONTROL FOR ARTIFICIALLY LAYERED STRUCTURES

被引：2

作者：

GOGOL, CA ^{[1
]}

DEUTSCHMAN, RA ^{[1
]}

BEAN, JC ^{[1
]}

机构：

[1] AT&T BELL LABS,MURRAY HILL,NJ 07974

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1987年 / 5卷 / 04期

关键词：

D O I：

10.1116/1.574923

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：2077 / 2080

页数：4

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