MEASUREMENT OF DIFFUSED SEMICONDUCTOR SURFACE CONCENTRATIINS BY INFRARED PLASMA REFLECTION

被引：35

作者：

GARDNER, EE

KAPPALLO, W

GORDON, CR

机构：

来源：

APPLIED PHYSICS LETTERS | 1966年 / 9卷 / 12期

关键词：

D O I：

10.1063/1.1754642

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：432 / &

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