NITRIDE FORMATION AT METAL-SURFACES BY AR+ ION-BOMBARDMENT IN NITROGEN ATMOSPHERE

被引：9

作者：

BABA, Y

SASAKI, TA

机构：

来源：

MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING | 1989年 / 115卷

关键词：

D O I：

10.1016/0921-5093(89)90680-1

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：203 / 207

页数：5

共 16 条

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[8] SPUTTER-EROSION AND IMPURITY EMISSION FROM TITANIUM AND VANADIUM AT LOW-ENERGY ION-BOMBARDMENT [J].

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