DC ELECTRICAL-CONDUCTIVITY OF AMORPHOUS SI3N4-C COMPOSITES PREPARED BY CHEMICAL VAPOR-DEPOSITION

被引:7
作者
GOTO, T
HIRAI, T
机构
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D O I
10.1007/BF00560626
中图分类号
T [工业技术];
学科分类号
08 ;
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页码:383 / 390
页数:8
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