共 7 条
[1]
RECOMBINATION OF GROUND STATE HALOGEN ATOMS .2. KINETICS OF OVERALL RECOMBINATION OF CHLORINE ATOMS
[J].
TRANSACTIONS OF THE FARADAY SOCIETY,
1968, 64 (550P)
:2698-&
[2]
CLYNE MAA, 1979, REACTIVE INTERMEDIAT, pCH1
[4]
DANNER DA, UNPUB J APPL PHYS
[5]
HESS DW, 1984, DRY ETCHING MICROELE, pCH1
[7]
ETCH PRODUCTS FROM THE REACTION ON CL-2 WITH AL(100) AND CU(100) AND XEF2 WITH W(111) AND NB
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1985, 3 (01)
:9-15