THE INITIAL-STAGES OF GROWTH OF SILICON ON SI(111) BY SLOW POSITRON-ANNIHILATION LOW-ENERGY ELECTRON-DIFFRACTION

被引:51
作者
VONHOEGEN, MH [1 ]
FALTA, J [1 ]
HENZLER, M [1 ]
机构
[1] UNIV HANOVER,INST FESTKORPERPHYS,W-3000 HANOVER,GERMANY
关键词
D O I
10.1016/0040-6090(89)90446-X
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:213 / 220
页数:8
相关论文
共 14 条
[1]   NUCLEATION AND GROWTH DURING MOLECULAR-BEAM EPITAXY (MBE) OF SI ON SI(111) [J].
ALTSINGER, R ;
BUSCH, H ;
HORN, M ;
HENZLER, M .
SURFACE SCIENCE, 1988, 200 (2-3) :235-246
[2]   TUNNELING MICROSCOPY OF SILICON AND GERMANIUM - SI(111) 7X7, SNGE(111) 7X7, GESI(111) 5X5, SI(111) 9X9, GE(111) 2X8, GE(100) 2X1, SI(110) 5X1 [J].
BECKER, RS ;
SWARTZENTRUBER, BS ;
VICKERS, JS .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1988, 6 (02) :472-477
[3]   MEASUREMENT OF SURFACE-DEFECTS BY LOW-ENERGY ELECTRON-DIFFRACTION [J].
HENZLER, M .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1984, 34 (04) :205-214
[4]   DEFECTS AT SEMICONDUCTOR SURFACES [J].
HENZLER, M .
SURFACE SCIENCE, 1985, 152 (APR) :963-976
[5]   LEED STUDIES OF SURFACE IMPERFECTIONS [J].
HENZLER, M .
APPLICATIONS OF SURFACE SCIENCE, 1982, 11-2 (JUL) :450-469
[6]  
HORN B, 1988, J VAC SCI TECHNOL B, V6, P727
[7]   LEED STUDIES OF SI MOLECULAR-BEAM EPITAXY ONTO SI(111) [J].
HORN, M ;
HENZLER, M .
JOURNAL OF CRYSTAL GROWTH, 1987, 81 (1-4) :428-433
[8]  
HORN M, 1988, THESIS HANNOVER
[9]  
KNIBB MG, 1988, PHYSICS, V18, P43
[10]  
KOHLER U, 1989, J VAC SCI TECHNOL A, V7, P2860, DOI 10.1116/1.576159