CLEAN AND CONTAMINATED TID2 FILMS - FABRICATION AND AUGER-SPECTRA

被引：28

作者：

MALINOWSKI, ME

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1978年 / 15卷 / 01期

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D O I：

10.1116/1.569434

中图分类号：

O59 [应用物理学];

学科分类号：

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页码：39 / 41

页数：3

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