FORMATION OF RECOMBINATION CENTERS IN EPITAXIAL GAAS DUE TO RAPID CHANGES OF THE GROWTH VELOCITY

被引:9
作者
JASTRZEBSKI, L [1 ]
LAGOWSKI, J [1 ]
GATOS, HC [1 ]
机构
[1] MIT,DEPT MAT SCI & ENGN,CAMBRIDGE,MA 02139
关键词
D O I
10.1149/1.2127483
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
引用
收藏
页码:697 / 699
页数:3
相关论文
共 7 条
[1]   ELECTROEPITAXY OF MULTICOMPONENT SYSTEMS - TERNARY AND QUARTERNARY COMPOUNDS [J].
BRYSKIEWICZ, T ;
LAGOWSKI, J ;
GATOS, HC .
JOURNAL OF APPLIED PHYSICS, 1980, 51 (02) :988-996
[2]  
CHIKAWA J, 1979, JAPAN J APPL PHY S18, V18, P153
[3]   EFFECT OF GROWTH PARAMETERS ON FORMATION AND ELIMINATION OF VACANCY CLUSTERS IN DISLOCATION-FREE SILICON-CRYSTALS [J].
DEKOCK, AJR ;
ROKSNOER, PJ ;
BOONEN, PGT .
JOURNAL OF CRYSTAL GROWTH, 1974, 22 (04) :311-320
[4]   THICKNESS UNIFORMITY OF GAAS LAYERS GROWN BY ELECTROEPITAXY [J].
JASTRZEBSKI, L ;
IMAMURA, Y ;
GATOS, HC .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1978, 125 (07) :1140-1146
[5]   LIQUID-PHASE ELECTROEPITAXY - GROWTH KINETICS [J].
JASTRZEBSKI, L ;
LAGOWSKI, J ;
GATOS, HC ;
WITT, AF .
JOURNAL OF APPLIED PHYSICS, 1978, 49 (12) :5909-5919
[6]   EFFECT OF RECONSTRUCTION OF A SEMICONDUCTOR SURFACE ON CRYSTAL-GROWTH [J].
VANVECHTEN, JA .
APPLIED PHYSICS LETTERS, 1975, 26 (11) :593-596
[7]   POINT DEFECT TRAPPING IN CRYSTAL GROWTH [J].
WEBB, WW .
JOURNAL OF APPLIED PHYSICS, 1962, 33 (06) :1961-&