ENERGETIC PARTICLE BOMBARDMENT OF FILMS DURING MAGNETRON SPUTTERING

被引：77

作者：

ROSSNAGEL, SM

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1989年 / 7卷 / 03期

关键词：

D O I：

10.1116/1.576223

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：1025 / 1029

页数：5

共 21 条

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