TRANSPORT IN STRAIN RELAXED IN0.15AL0.85AS/IN0.17GA0.83AS HETEROJUNCTIONS

被引:15
作者
FERNANDEZ, JM
CHEN, JH
WIEDER, HH
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1993年 / 11卷 / 04期
关键词
D O I
10.1116/1.578322
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The electrical and galvanomagnetic properties of the two-dimensional electron gas (2DEG) in delta-doped and modulation doped strain-relaxed In0.15Al0.85As/In0.17Ga0.83As heterojunctions have been determined, as a function of sheet carrier density, by temperature dependent resistivity Hall and 1.6 K Shubnikov de Haas (SdH) oscillatory magnetoresistance measurements. The structures were grown by molecular-beam epitaxy on misoriented (001) GaAs substrates; strain relaxation, confirmed by double crystal x-ray diffraction, was obtained by means of step graded InxGa1-xAs buffer layers with x = 0.10, and x = 0.15 steps of 0.3 mum in thickness. Low temperature (1.6 K) SdH measurements confirm the presence of well behaved 2DEG layers with negligible parallel conduction, and single band occupancy for sheet carrier densities ranging from 7.4 X 10(11) CM-2 to 1.0 X 10(12) cm-2, and respective mobilities of 7.5 X 10(4) cm2/V s and 6.1 X 10(4) cm2/V s. Low field resistivity and Hall measurements suggest a transition, at a sheet carrier density of approximately 10(12) cm-2, from an alloy scattering dominated mobility, to a mobility limited by ionized impurity scattering. The excellent transport properties of the 2DEG channels suggests the use of strain relaxation by means of appropriate buffer layers for heterostructure devices grown on gallium arsenide substrates.
引用
收藏
页码:889 / 892
页数:4
相关论文
共 24 条
[1]   CRYSTALLOGRAPHIC TILTING OF HETEROEPITAXIAL LAYERS [J].
AYERS, JE ;
GHANDHI, SK ;
SCHOWALTER, LJ .
JOURNAL OF CRYSTAL GROWTH, 1991, 113 (3-4) :430-440
[2]   STRAIN RELAXATION OF COMPOSITIONALLY GRADED INXGA1-XAS BUFFER LAYERS FOR MODULATION-DOPED IN0.3GA0.7AS/IN0.29AL0.71AS HETEROSTRUCTURES [J].
CHANG, JCP ;
CHEN, JH ;
FERNANDEZ, JM ;
WIEDER, HH ;
KAVANAGH, KL .
APPLIED PHYSICS LETTERS, 1992, 60 (09) :1129-1131
[3]   LATTICE-MISMATCHED IN0.53GA0.47AS/IN0.52AL0.48AS MODULATION-DOPED FIELD-EFFECT TRANSISTORS ON GAAS - MOLECULAR-BEAM EPITAXIAL-GROWTH AND DEVICE PERFORMANCE [J].
CHANG, K ;
BHATTACHARYA, P ;
LAI, R .
JOURNAL OF APPLIED PHYSICS, 1990, 67 (07) :3323-3327
[4]   0.1-MU-M GATE-LENGTH PSEUDOMORPHIC HEMTS [J].
CHAO, PC ;
TIBERIO, RC ;
DUH, KHG ;
SMITH, PM ;
BALLINGALL, JM ;
LESTER, LF ;
LEE, BR ;
JABRA, A ;
GIFFORD, GG .
IEEE ELECTRON DEVICE LETTERS, 1987, 8 (10) :489-491
[5]   COMPOSITION DEPENDENT TRANSPORT-PROPERTIES OF STRAIN RELAXED INXGA1-XAS(X-LESS-THAN-OR-EQUAL-TO-0.45) EPILAYERS [J].
CHEN, JH ;
FERNANDEZ, JM ;
WIEDER, HH .
APPLIED PHYSICS LETTERS, 1992, 61 (09) :1116-1118
[6]  
CHEN JH, UNPUB 1992 P SPR MRS
[7]   SCHOTTKY-BARRIER HEIGHT OF INXAL1-XAS EPITAXIAL AND STRAINED LAYERS [J].
CHU, P ;
LIN, CL ;
WIEDER, HH .
APPLIED PHYSICS LETTERS, 1988, 53 (24) :2423-2425
[8]   MAGNETOTRANSPORT PROPERTIES OF 2-DIMENSIONAL CHANNELS IN PSEUDOMORPHIC AND STRAIN RELAXED IN0.17GA0.83AS HETEROJUNCTIONS [J].
FERNANDEZ, JM ;
CHEN, JH ;
WIEDER, HH .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1992, 10 (04) :1824-1828
[9]  
FERNANDEZ JM, IN PRESS 7TH P INT M
[10]   LATTICE-MISMATCHED GROWTH AND TRANSPORT-PROPERTIES OF INALAS INGAAS HETEROSTRUCTURES ON GAAS SUBSTRATES [J].
HARMAND, JC ;
MATSUNO, T ;
INOUE, K .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1989, 28 (07) :L1101-L1103