MINORITY-CARRIER DIFFUSION LENGTH MAPPING IN SILICON-WAFERS USING A SI-ELECTROLYTE-CONTACT

被引：108

作者：

LEHMANN, V

FOLL, H

机构：

[1] Siemens AG, Germany

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1988年 / 135卷 / 11期

关键词：

D O I：

10.1149/1.2095442

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：2831 / 2835

页数：5

共 19 条

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