AUTOMATED-SYSTEM FOR THE GROWTH OF MULTILAYERED STRUCTURES IN THE (GAAL)AS SYSTEM BY LPE

被引:9
作者
SMALL, MB
BLACKWELL, JC
POTEMSKI, RM
机构
[1] IBM T.J. Watson Research Center, Yorktown Heights
关键词
D O I
10.1016/0022-0248(79)90065-4
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
Both the apparatus and procedures which we use for growing double heterostructure lasers by LPE have been improved with regard to their reproducibility, ease of operation and efficiency. The major part of these improvements has been in designing a system by means of which growth crucible may be manipulated in the furnace using a stepping motor. By using this facility it has been possible to automate the growth process. As a result of these changes both the yield of high quality crystals and the efficiency of their production have greatly increased. © 1979.
引用
收藏
页码:253 / 261
页数:9
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