PREPARATION AND PERFORMANCE OF (CR,TI)N COATINGS DEPOSITED BY A COMBINED HOLLOW-CATHODE AND CATHODIC ARC TECHNIQUE

被引：10

作者：

EBERSBACH, G

FABIAN, D

WUTTKE, W

JEHN, HA

机构：

[1] FORSCHUNGSINST EDELMET & MET CHEM, W-7070 SCHWABISCH GMUND, GERMANY

[2] GESELL FERTIGUNGSTECH & ENTWICKLUNG, INST PHYS & MECH TECHNOL, O-9010 CHEMNITZ, GERMANY

[3] FACHHSCH ZWICKAU, LEHRSTUHL PHYS, O-9500 ZWICKAU, GERMANY

来源：

SURFACE & COATINGS TECHNOLOGY | 1993年 / 59卷 / 1-3期

关键词：

D O I：

10.1016/0257-8972(93)90076-Z

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The deposition of (Cr,Ti)N on hardened cold-worked steel samples was performed in an industrial multisource deposition device consisting of two hollow cathode discharge evaporators and one cathodic arc evaporator. The high and considerably ionized particle fluxes of the deposition sources were directed on to the multiple rotation substrate holder. Special emphasis was laid on the effect of substrate position and movement on the coating composition, properties and performance. In particular, the total film composition was strongly influenced. Substrate movement by means of a threefold rotating system resulted in an oscillating depth distribution of the components. Application of the additional arc source yielded a denser film structure. Results of hardness, stress, friction and wear measurements are reported.

引用

页码：160 / 165

页数：6