THIN-FILM REACTION BETWEEN TI AND SI3N4

[1] PHASE-EQUILIBRIA IN THIN-FILM METALLIZATIONS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1984, 2 (04): : 781 - 784

[2] BORISOV YS, 1978, POROSHKOVAYA METALLU, V183, P63

[3] A CORRELATION OF AUGER-ELECTRON SPECTROSCOPY, X-RAY PHOTOELECTRON-SPECTROSCOPY, AND RUTHERFORD BACKSCATTERING SPECTROMETRY MEASUREMENTS ON SPUTTER-DEPOSITED TITANIUM NITRIDE THIN-FILMS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (06): : 2463 - 2469

[4] ALGORITHMS FOR THE RAPID SIMULATION OF RUTHERFORD BACKSCATTERING SPECTRA [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 9 (03) : 344 - 351

[5] HANSEN M, 1958, CONSTITUTION BINARY, P1069

[6] REACTION OF TITANIUM WITH SILICON-NITRIDE UNDER RAPID THERMAL ANNEALING [J]. APPLIED PHYSICS LETTERS, 1986, 49 (19) : 1236 - 1238

[1] PHASE-EQUILIBRIA IN THIN-FILM METALLIZATIONS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1984, 2 (04): : 781 - 784

[2] BORISOV YS, 1978, POROSHKOVAYA METALLU, V183, P63

[3] A CORRELATION OF AUGER-ELECTRON SPECTROSCOPY, X-RAY PHOTOELECTRON-SPECTROSCOPY, AND RUTHERFORD BACKSCATTERING SPECTROMETRY MEASUREMENTS ON SPUTTER-DEPOSITED TITANIUM NITRIDE THIN-FILMS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (06): : 2463 - 2469

[4] ALGORITHMS FOR THE RAPID SIMULATION OF RUTHERFORD BACKSCATTERING SPECTRA [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 9 (03) : 344 - 351

[5] HANSEN M, 1958, CONSTITUTION BINARY, P1069

[6] REACTION OF TITANIUM WITH SILICON-NITRIDE UNDER RAPID THERMAL ANNEALING [J]. APPLIED PHYSICS LETTERS, 1986, 49 (19) : 1236 - 1238