DEFECTS IN EPITAXIAL LAYERS OF SILICON-GERMANIUM GROWN ON SILICON SUBSTRATES

被引：8

作者：

AHARONI, H

BARLEV, A

MARGALIT, S

机构：

来源：

JOURNAL OF CRYSTAL GROWTH | 1972年 / 17卷 / DEC期

关键词：

D O I：

10.1016/0022-0248(72)90255-2

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

引用

页码：254 / &

共 13 条

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[5]

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CHRISTIAN, SM .

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[7]

MARGALIT S, 1971, THESIS TECHNION

[8] EPITAXIAL SILICON-GERMANIUM ALLOY FILMS ON SILICON SUBSTRATES [J].

MILLER, KJ ;

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[9]

ODA J, 1962, JAPAN J APPL PHYS, V1, P131

[10] SLIP PATTERNS ON BORON-DOPED SILICON SURFACES [J].

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