DIRECT OBSERVATIONS OF COLUMNAR STRUCTURE IN GLASSY-GESE2 FILMS BY ELECTRON-MICROSCOPY

被引：14

作者：

CHEN, CH

机构：

来源：

关键词：

D O I：

10.1016/0022-3093(81)90043-0

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：391 / 395

页数：5

共 9 条

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[9] BILEVEL HIGH-RESOLUTION PHOTOLITHOGRAPHIC TECHNIQUE FOR USE WITH WAFERS WITH STEPPED AND-OR REFLECTING SURFACES
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