THIN-FILM PROCESSES FOR MICROELECTRONIC APPLICATION

被引：8

作者：

GREGOR, LV

机构：

来源：

PROCEEDINGS OF THE INSTITUTE OF ELECTRICAL AND ELECTRONICS ENGINEERS | 1971年 / 59卷 / 10期

关键词：

D O I：

10.1109/PROC.1971.8445

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：1390 / &

共 86 条

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[3]

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[4]

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[5]

BEESLEY MJ, 1968, ELECTRON LETT, V4

[6] EVAPORATED FILM PROFILES OVER STEPS IN SUBSTRATES [J].

BLECH, IA .

[7]

BOBECK AH, 1967, BELL SYST TECH J, V46

[8]

BONYHARD PI, 1970, IEEE T MAGN, VMAG6, P447

[9] CHARGE COUPLED SEMICONDUCTOR DEVICES [J].

BOYLE, WS ;

SMITH, GE .

BELL SYSTEM TECHNICAL JOURNAL, 1970, 49 (04) :587-+

[10] PRECISION THIN-FILM CERMET RESISTORS FOR INTEGRATED CIRCUITS [J].

BRAUN, L ;

LOOD, DE .

PROCEEDINGS OF THE INSTITUTE OF ELECTRICAL AND ELECTRONICS ENGINEERS, 1966, 54 (11) :1521-&