NEGATIVE THERMAL FEEDBACK IN LASER-ASSISTED OXIDATION OF THIN ZN FILMS

被引：11

作者：

WAUTELET, M ^{[1
]}

LAUDE, LD ^{[1
]}

HANUS, F ^{[1
]}

HEINIG, KH ^{[1
]}

机构：

[1] ZENT INST KERNFORSCH,DDR-8051 DRESDEN,GER DEM REP

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1988年 / 47卷 / 03期

关键词：

D O I：

10.1007/BF00615938

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：313 / 316

页数：4

共 11 条

[1]

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[2]

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HOULE, FA ;

WILSON, RJ .

JOURNAL OF APPLIED PHYSICS, 1987, 61 (09) :4640-4651

[4]

BOYD IW, 1988, LASER PROCESSING THI

[5]

Bunkin F. V., 1982, Soviet Physics - Uspekhi, V25, P662, DOI 10.1070/PU1982v025n09ABEH004601

[6]

READY JF, 1971, EFFECTS HIGH POWER L

[7]

von Allmen M., 1987, LASER BEAM INTERACTI

[8]

Wautelet M., 1983, Materials Letters, V2, P20, DOI 10.1016/0167-577X(83)90023-X

[9] LASER-ASSISTED OXIDATION OF METALLIC-FILMS ON INSULATORS [J].

WAUTELET, M ;

ANDREW, R .

PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1987, 55 (02) :261-269

[10] ORIGIN OF LASER-ASSISTED AND DOPING-ASSISTED PHENOMENA IN SEMICONDUCTORS [J].

WAUTELET, M ;

QUENON, P ;

JADIN, A .

SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 1988, 3 (01) :54-59

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