CONTRIBUTION TO STUDY OF TRAPPING CENTERS IN THERMIC TA2O5

被引：6

作者：

SEVE, G ^{[1
]}

LASSABATERE, L ^{[1
]}

机构：

[1] UNIV SCI & TECH LANGUEDOC, CNRS, CTR ETUDES ELECTR SOLIDES, MONTPELLIER, FRANCE

来源：

THIN SOLID FILMS | 1974年 / 21卷 / 01期

关键词：

D O I：

10.1016/0040-6090(74)90085-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：19 / 27

页数：9

共 15 条

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WOODS, J .

BRITISH JOURNAL OF APPLIED PHYSICS, 1967, 18 (08) :1045-&

[3]

CROSET M, 1972, COLLOQUE INT AVISEM, V152, P307

[4]

DELLOCA CJ, 1970, J ELECTROCHEM SOC, V117, P1549

[5]

DREINER R, 1964, J ELECTROCHEM SOC, V111, P24

[6]

HUSTED D, 1971, J ELECTROCHEM SOC, V118, P1991

[7] STUDY OF OXIDE CAPTURE OF AN MOS STRUCTURE BY THERMAL STIMULATION [J].

LASSABATERE, L ;

SEVE, G ;

MENDOLIA, J .

THIN SOLID FILMS, 1970, 6 (06) :381-+

[8] DIELECTRIC PROPERTIES OF TA2O5 THIN FILMS [J].

PULFREY, DL ;

WILCOX, PS ;

YOUNG, L .

JOURNAL OF APPLIED PHYSICS, 1969, 40 (10) :3891-&

[9] STUDY OF THIN-FILMS OF TANTALUM OXIDE BY THERMAL CURRENT METHOD [J].

SEVE, G ;

LASSABATERE, L .

THIN SOLID FILMS, 1973, 15 (03) :285-301

[10] SPACE CHARGE CONTRIBUTION TO POLARIZATION CURRENT IN THIN AMORPHOUS DIELECTRIC FILMS [J].

SHOUSHA, AHM ;

YOUNG, L .

THIN SOLID FILMS, 1971, 8 (05) :383-&

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