ELECTRICAL ACTIVATION OF SILICON IMPLANTED IN SEMIINSULATING GAAS - ROLE OF BORON AND THE MIDGAP ELECTRON TRAP (EL2)

被引:16
作者
MORROW, RA [1 ]
机构
[1] OREGON GRAD CTR,DEPT APPL PHYS & ELECT ENGN,BEAVERTON,OR 97006
关键词
D O I
10.1063/1.339247
中图分类号
O59 [应用物理学];
学科分类号
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页码:3671 / 3676
页数:6
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