INFRARED REFLECTANCE SPECTRA OF THIN EPITAXIAL SILICON LAYERS

被引：17

作者：

SENITZKY, B ^{[1
]}

WEEKS, SP ^{[1
]}

机构：

[1] BELL TEL LABS INC,555 UNION BLVD,ALLENTOWN,PA 18103

来源：

关键词：

D O I：

10.1063/1.329388

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：5308 / 5314

页数：7

共 39 条

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