ADSORPTION OF ATOMIC OXYGEN ON THE SI(110)5X1 SURFACE VIA INTERACTION WITH N2O

被引：14

作者：

KEIM, EG

VANSILFHOUT, A

WOLTERBEEK, L

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1987年 / 5卷 / 04期

关键词：

D O I：

10.1116/1.574176

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：1019 / 1023

页数：5

共 18 条

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