NUCLEATION AND EPITAXIAL-GROWTH OF INAS ON SI (100) BY ION-ASSISTED DEPOSITION

被引:19
作者
CHOI, CH [1 ]
BARNETT, SA [1 ]
机构
[1] NORTHWESTERN UNIV,MAT RES CTR,EVANSTON,IL 60208
关键词
D O I
10.1063/1.102049
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:2319 / 2321
页数:3
相关论文
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