STRUCTURE AND PROPERTIES OF C-BN FILM DEPOSITED BY ACTIVATED REACTIVE EVAPORATION WITH A GAS ACTIVATION NOZZLE

被引：52

作者：

INAGAWA, K

WATANABE, K

SAITOH, K

YUCHI, Y

ITOH, A

机构：

来源：

SURFACE & COATINGS TECHNOLOGY | 1989年 / 39卷 / 1-3期

关键词：

D O I：

10.1016/0257-8972(89)90059-5

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：253 / 264

页数：12

共 22 条

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[9] PREPARATION OF CUBIC BORON-NITRIDE FILM BY ACTIVATED REACTIVE EVAPORATION WITH A GAS ACTIVATION NOZZLE [J].

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