REFLECTANCE-DIFFERENCE SPECTROSCOPY - A NEW PROBE OF CRYSTAL-GROWTH BY MBE AND OMCVD

被引:24
作者
ASPNES, DE
机构
关键词
D O I
10.1109/3.28000
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:1056 / 1063
页数:8
相关论文
共 45 条
[1]   INSITU INVESTIGATION OF THE GROWTH OF RF GLOW-DISCHARGE DEPOSITED AMORPHOUS-GERMANIUM AND SILICON FILMS [J].
ANTOINE, AM ;
DREVILLON, B ;
CABARROCAS, PRI .
JOURNAL OF APPLIED PHYSICS, 1987, 61 (07) :2501-2508
[2]  
Aspnes D. E., 1988, Proceedings of the SPIE - The International Society for Optical Engineering, V946, P112, DOI 10.1117/12.947419
[3]   ANISOTROPIES IN THE ABOVE BAND-GAP OPTICAL-SPECTRA OF CUBIC SEMICONDUCTORS [J].
ASPNES, DE ;
STUDNA, AA .
PHYSICAL REVIEW LETTERS, 1985, 54 (17) :1956-1959
[4]   OPTICAL-REFLECTANCE AND ELECTRON-DIFFRACTION STUDIES OF MOLECULAR-BEAM-EPITAXY GROWTH TRANSIENTS ON GAAS(001) [J].
ASPNES, DE ;
HARBISON, JP ;
STUDNA, AA ;
FLOREZ, LT .
PHYSICAL REVIEW LETTERS, 1987, 59 (15) :1687-1690
[5]   APPLICATION OF REFLECTANCE DIFFERENCE SPECTROSCOPY TO MOLECULAR-BEAM EPITAXY GROWTH OF GAAS AND ALAS [J].
ASPNES, DE ;
HARBISON, JP ;
STUDNA, AA ;
FLOREZ, LT .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1988, 6 (03) :1327-1332
[6]   OPTICAL STUDIES OF MOLECULAR-BEAM EPITAXY GROWTH OF GAAS AND ALAS [J].
ASPNES, DE ;
HARBISON, JP ;
STUDNA, AA ;
FLOREZ, LT ;
KELLY, MK .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1988, 6 (04) :1127-1131
[7]   REFLECTANCE DIFFERENCE SPECTROSCOPY OF GAAS(110) AND INP(110) [J].
ASPNES, DE ;
STUDNA, AA .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (04) :546-549
[8]   ABOVE-BANDGAP OPTICAL ANISOTROPIES IN CUBIC SEMICONDUCTORS - A VISIBLE NEAR ULTRAVIOLET PROBE OF SURFACES [J].
ASPNES, DE .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1985, 3 (05) :1498-1506
[9]   REFLECTANCE-DIFFERENCE SPECTROSCOPY SYSTEM FOR REAL-TIME MEASUREMENTS OF CRYSTAL-GROWTH [J].
ASPNES, DE ;
HARBISON, JP ;
STUDNA, AA ;
FLOREZ, LT .
APPLIED PHYSICS LETTERS, 1988, 52 (12) :957-959
[10]  
ASPNES DE, IN PRESS 15TH P INT