THETA-PINCH PLASMA HYDROGENATION OF EVAPORATED AMORPHOUS-SILICON FILMS

被引：6

作者：

JOHN, PK ^{[1
]}

WONG, SK ^{[1
]}

GOGNA, PK ^{[1
]}

TONG, BY ^{[1
]}

CHIK, KP ^{[1
]}

机构：

[1] CHINESE UNIV HONG KONG, SHATIN, HONG KONG

来源：

JOURNAL DE PHYSIQUE | 1981年 / 42卷 / NC4期

关键词：

D O I：

10.1051/jphyscol:19814140

中图分类号：

学科分类号：

摘要：

引用

页码：639 / 642

页数：4

共 19 条

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