THE ROLE OF ALKALI-METAL LAYERS IN THE OXIDATION OF SI AND GE SURFACES - A COMPARATIVE-STUDY

被引:9
作者
RIEHLCHUDOBA, M
SCHIRM, KM
SURNEV, L
SOUKIASSIAN, P
机构
[1] CEA, DSM RES BV, DRECAM, SRSIM, F-91191 GIF SUR YVETTE, FRANCE
[2] UNIV PARIS 11, DEPT PHYS, F-91405 ORSAY, FRANCE
关键词
ALKALI METALS; CATALYSIS; OXYGEN; SILICON OXIDES; SILICON-GERMANIUM; X-RAY PHOTOELECTRON SPECTROSCOPY;
D O I
10.1016/0039-6028(95)00078-X
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
The oxygen uptake and related oxide formation on clean and alkali-metal-covered Si(100)2 x 1 and Ge(100)2 x 1 surfaces have been studied by core-level photoemission spectroscopy. On both substrates, the O(2) sticking probability is drastically increased in the presence of alkali-metal atoms (e.g. by at least four orders of magnitude). However, while on Si the room-temperature oxidation is promoted by the alkali-metal overlayer, an inhibition of the Ge surface oxidation occurs. This situation changes dramatically when the molecular oxygen exposure is performed at slightly enhanced Ge substrate temperatures (greater than or equal to 200 degrees C). In this case, the role of the alkali-metal overlayer is reversed with promotion of the Ge substrate oxidation. These results reveal new insights into the understanding of alkali-metal-promoted reactions.
引用
收藏
页码:375 / 380
页数:6
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