SIO2-SI INTERFACE FORMATION BY CATALYTIC-OXIDATION USING ALKALI-METALS AND REMOVAL OF THE CATALYST SPECIES

被引：83

作者：

SOUKIASSIAN, P

GENTLE, TM

BAKSHI, MH

HURYCH, Z

机构：

[1] DOW CHEM CO,MIDLAND,MI 48640

[2] NO ILLINOIS UNIV,DEPT PHYS,DE KALB,IL 60115

来源：

JOURNAL OF APPLIED PHYSICS | 1986年 / 60卷 / 12期

关键词：

D O I：

10.1063/1.337485

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：4339 / 4341

页数：3

共 21 条

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