MECHANISM OF THE INTERACTION OF THIN-FILMS WITH RESONATING QUARTZ CRYSTAL SUBSTRATES - ENERGY-TRANSFER MODEL

被引：55

作者：

MECEA, V

BUCUR, RV

机构：

[1] Institute of Isotopic and Molecular Technology, R-3400 Cluj-Napoca

来源：

THIN SOLID FILMS | 1979年 / 60卷 / 01期

关键词：

D O I：

10.1016/0040-6090(79)90349-3

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

This paper is concerned with a new theoretical model which described the interaction of thin films with resonating quartz crystals in thickness monitoring devices. Special attention is paid to the anelastic properties of the deposited film leading to deviations from normal elastic thin rilm behaviour. © 1979.

引用

页码：73 / 84

页数：12

共 28 条

[1] Behrndt K., 1962, VACUUM, V12, P1, DOI [10.1016/0042-207X(62)90818-7, DOI 10.1016/0042-207X(62)90818-7]
[2] LONG-TERM OPERATION OF CRYSTAL OSCILLATORS IN THIN-FILM DEPOSITION
BEHRNDT, KH
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1971, 8 (05): : 622 - &
[3] SIMULTANEOUS THIN-FILM STRESS AND MASS-CHANGE MEASUREMENTS USING QUARTZ RESONATORS
EERNISSE, EP
[J]. JOURNAL OF APPLIED PHYSICS, 1972, 43 (04) : 1330 - +
[4] VACUUM APPLICATIONS OF QUARTZ RESONATORS
EERNISSE, EP
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (01): : 564 - 568
[5] EXTENSION OF DOUBLE RESONATOR TECHNIQUE
EERNISSE, EP
[J]. JOURNAL OF APPLIED PHYSICS, 1973, 44 (10) : 4482 - 4485
[6] FEYNMAN RP, 1966, LECTURES PHYSICS, V1, P24
[7] LANDAU E, 1971, MECANIQUE FLUIDES, P111
[8] Lostis P., 1959, REV OPT, V38, P1
[9] LOSTIS P, 1959, J PHYS RADIUM, V20, P255
[10] INVESTIGATION OF FILM-THICKNESS DETERMINATION BY OSCILLATING QUARTZ RESONATORS WITH LARGE MASS LOAD
LU, CS
LEWIS, O
[J]. JOURNAL OF APPLIED PHYSICS, 1972, 43 (11) : 4385 - &

← 1 2 3 →