MECHANISM OF THE INTERACTION OF THIN-FILMS WITH RESONATING QUARTZ CRYSTAL SUBSTRATES - ENERGY-TRANSFER MODEL

被引：55

作者：

MECEA, V

BUCUR, RV

机构：

[1] Institute of Isotopic and Molecular Technology, R-3400 Cluj-Napoca

来源：

THIN SOLID FILMS | 1979年 / 60卷 / 01期

关键词：

D O I：

10.1016/0040-6090(79)90349-3

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

This paper is concerned with a new theoretical model which described the interaction of thin films with resonating quartz crystals in thickness monitoring devices. Special attention is paid to the anelastic properties of the deposited film leading to deviations from normal elastic thin rilm behaviour. © 1979.

引用

页码：73 / 84

页数：12

共 28 条

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