PROGRESS IN MONITORING THIN-FILM THICKNESS WITH QUARTZ CRYSTAL RESONATORS

被引：52

作者：

PULKER, HK

BENES, E

HAMMER, D

SOLLNER, E

机构：

[1] BALZERS AG HOCHVAKUUM TECH & DUNNE SCHICHTEN,GRUNDLAGENENTWICKLUNG,FL-9496 BALZERS,LIECHTENSTEIN

[2] TECH UNIV VIENNA,INST ALLGEMEINE PHYS,KARLSPLATZ 13,A-1040 VIENNA,AUSTRIA

来源：

THIN SOLID FILMS | 1976年 / 32卷 / 01期

关键词：

D O I：

10.1016/0040-6090(76)90547-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

收藏

页码：27 / 33

页数：7

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