DIAMOND DEPOSITION ON CEMENTED CARBIDE BY CHEMICAL VAPOR-DEPOSITION USING A TANTALUM FILAMENT

被引:43
作者
MATSUBARA, H [1 ]
SAKUMA, T [1 ]
机构
[1] UNIV TOKYO,FAC ENGN,DEPT MAT SCI,BUNKYO KU,TOKYO 113,JAPAN
关键词
D O I
10.1007/BF00581110
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Diamond deposition on WC-Co cemented carbide was examined by chemical vapour deposition using a tantalum filament. The filament was much superior to conventional tungsten filament for high-temperature use. Diamond film was deposited at a filament temperature up to about 2600 °C for tantalum filament, which was much higher than the maximum filament temperature available for tungsten (2000 °C). The critical methane concentration in H2-CH4 gas for diamond deposition became higher with increasing filament temperature. A deposition rate about 20 times higher was obtained when using a tantalum filament compared with a tungsten filament. The origin of the improved deposition rate of diamond on WC-Co substrate using a tantalum filament is discussed. © 1990 Chapman and Hall Ltd.
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页码:4472 / 4476
页数:5
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