HYDROGEN DESORPTION-KINETICS FROM MONOHYDRIDE AND DIHYDRIDE SPECIES ON SILICON SURFACES

被引：542

作者：

GUPTA, P

COLVIN, VL

GEORGE, SM

机构：

来源：

PHYSICAL REVIEW B | 1988年 / 37卷 / 14期

关键词：

D O I：

10.1103/PhysRevB.37.8234

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：8234 / 8243

页数：10

共 57 条

[31] REACTIONS OF ATOMIC-HYDROGEN WITH THE SI(111) (7X7) SURFACE BY HIGH-RESOLUTION ELECTRON-ENERGY LOSS SPECTROSCOPY [J].

KOBAYASHI, H ;

EDAMOTO, K ;

ONCHI, M ;

NISHIJIMA, M .

JOURNAL OF CHEMICAL PHYSICS, 1983, 78 (12) :7429-7436

[32]

KOEHLER BG, IN PRESS J CHEM PHYS

[33] SI-H BOND PRODUCTION BY NH3 ADSORPTION ON SI(111) - AN UPS STUDY [J].

KUBLER, L ;

HLIL, EK ;

BOLMONT, D ;

GEWINNER, G .

SURFACE SCIENCE, 1987, 183 (03) :503-514

[34] HEAT-TREATMENT EFFECT ON POROUS SILICON [J].

LABUNOV, V ;

BONDARENKO, V ;

GLINENKO, L ;

DOROFEEV, A ;

TABULINA, L .

THIN SOLID FILMS, 1986, 137 (01) :123-134

[35]

LEIFELS J, 1984, THESIS U HANNOVER FE

[36] OXYGEN-BONDING ENVIRONMENTS IN GLOW-DISCHARGE DEPOSITED AMORPHOUS SILICON-HYDROGEN ALLOY-FILMS [J].

LUCOVSKY, G ;

YANG, J ;

CHAO, SS ;

TYLER, JE ;

CZUBATYJ, W .

PHYSICAL REVIEW B, 1983, 28 (06) :3225-3233

[37] TIME-DEPENDENT CHANGES IN THE SI-HN VIBRATIONAL-SPECTRUM OF AMORPHOUS-SILICON, A-SI-H [J].

MASSON, D ;

PAQUIN, L ;

POULINDANDURAND, S ;

SACHER, E ;

YELON, A .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 1984, 66 (1-2) :93-98

[38] KINETICS OF DECOMPOSITION OF AMORPHOUS HYDROGENATED SILICON FILMS [J].

MCMILLAN, JA ;

PETERSON, EM .

JOURNAL OF APPLIED PHYSICS, 1979, 50 (08) :5238-5241

[39] EFFECTS OF PARTIAL EVOLUTION OF H FROM A-SI-H ON THE INFRARED VIBRATIONAL-SPECTRA AND THE PHOTO-LUMINESCENCE [J].

OGUZ, S ;

COLLINS, RW ;

PAESLER, MA ;

PAUL, W .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 1980, 35-6 (JAN-) :231-236

[40] DISSENT FROM THE DIHYDRIDE MODEL OF THE VIBRATIONAL-SPECTRA OF AMORPHOUS SILICON-HYDROGEN ALLOYS [J].

PAUL, W .

SOLID STATE COMMUNICATIONS, 1980, 34 (05) :283-285

← 1 2 3 4 5 6 →