IN-PROCESS THICKNESS MONITOR FOR POLYCRYSTALLINE SILICON DEPOSITION

被引：21

作者：

KAMINS, TI

DELLOCA, CJ

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1972年 / 119卷 / 01期

关键词：

D O I：

10.1149/1.2404114

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

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页码：112 / &

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