THE INFLUENCE OF EXCIMER LASER TREATMENT ON AN ALUMINUM-ALLOY SURFACE

被引:12
作者
BADEKAS, H
KOUTSOMICHALIS, A
PANAGOPOULOS, C
机构
[1] Natl Technical Univ of Athens, Athens, Greece, Natl Technical Univ of Athens, Athens, Greece
关键词
D O I
10.1016/0257-8972(88)90094-1
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:365 / 371
页数:7
相关论文
共 8 条
[1]  
Barrett C.S., 1966, STRUCTURE METALS CRY
[2]   AN X-RAY PHOTOELECTRON-SPECTROSCOPY STUDY OF POLY(METHYLMETHACRYLATE) AND POLY(ALPHA-METHYLSTYRENE) SURFACES IRRADIATED BY EXCIMER LASERS [J].
BURRELL, MC ;
LIU, YS ;
COLE, HS .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (06) :2459-2462
[3]   MICROSTRUCTURE OF DIELECTRIC THIN-FILMS FORMED BY E-BEAM CO-EVAPORATION [J].
FARABAUGH, EN ;
SANDERS, DM .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1983, 1 (02) :356-359
[4]  
FLINN R, 1986, ENG MATERIALS THEIR
[5]   ARF EXCIMER LASER-INDUCED CVD OF ALUMINUM-OXIDE FILMS [J].
MINAKATA, M ;
FURUKAWA, Y .
JOURNAL OF ELECTRONIC MATERIALS, 1986, 15 (03) :159-164
[6]   EXCIMER LASER ANNEALED GOLD AND SILVER OHMIC CONTACTS ON N+-GAAS [J].
SIRCAR, P .
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1986, 97 (01) :K69-&
[7]  
STEEN WM, 1985, MET MATER, V1, P730
[8]   ULTRAVIOLET-LIGHT STIMULATED THERMAL-OXIDATION OF SILICON [J].
YOUNG, EM ;
TILLER, WA .
APPLIED PHYSICS LETTERS, 1987, 50 (02) :80-82