ARF EXCIMER LASER-INDUCED CVD OF ALUMINUM-OXIDE FILMS

被引：12

作者：

MINAKATA, M ^{[1
]}

FURUKAWA, Y ^{[1
]}

机构：

[1] NIPPON TELEGRAPH & TEL PUBL CORP, MUSASHINO ELECT COMMUN LAB, MUSASHINO, TOKYO 180, JAPAN

来源：

JOURNAL OF ELECTRONIC MATERIALS | 1986年 / 15卷 / 03期

关键词：

D O I：

10.1007/BF02655330

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：159 / 164

页数：6

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