ELECTRON HEATING MECHANISMS IN HELIUM RF GLOW-DISCHARGES - A SELF-CONSISTENT KINETIC CALCULATION

被引：76

作者：

SOMMERER, TJ ^{[1
]}

HITCHON, WNG ^{[1
]}

LAWLER, JE ^{[1
]}

机构：

[1] UNIV WISCONSIN,DEPT ELECT & COMP ENGN,MADISON,WI 53706

来源：

PHYSICAL REVIEW LETTERS | 1989年 / 63卷 / 21期

关键词：

D O I：

10.1103/PhysRevLett.63.2361

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

页码：2361 / 2364

页数：4

共 15 条

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