ELECTRON HEATING MECHANISMS IN HELIUM RF GLOW-DISCHARGES - A SELF-CONSISTENT KINETIC CALCULATION

被引:76
作者
SOMMERER, TJ [1 ]
HITCHON, WNG [1 ]
LAWLER, JE [1 ]
机构
[1] UNIV WISCONSIN,DEPT ELECT & COMP ENGN,MADISON,WI 53706
关键词
D O I
10.1103/PhysRevLett.63.2361
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
引用
收藏
页码:2361 / 2364
页数:4
相关论文
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