STRESS DISTRIBUTIONS AND THIN-FILM MECHANICAL-PROPERTIES

[1] INTERNAL-STRESS OF THIN SILVER AND GOLD-FILMS AND ITS DEPENDENCE ON GAS-ADSORPTION [J]. THIN SOLID FILMS, 1979, 62 (02) : 195 - 208

[2] ALECK BJ, 1949, J APPL MECH-T ASME, V16, P118

[3] EFFECT OF IMPURITIES ON INTRINSIC STRESS IN THIN NI FILMS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1976, 13 (01): : 96 - 98

[4] BASCOM WD, 1978, ASTM SP640 ADHESION

[5] ENHANCED X-RAY DIFFRACTION FROM SUBSTRATE CRYSTALS CONTAINING DISCONTINUOUS SURFACE FILMS [J]. JOURNAL OF APPLIED PHYSICS, 1967, 38 (07) : 2913 - &

[6] CHOW TS, 1975, ADHESION SCI TECHNOL

[7] ORIGINS OF STRESS IN THIN NICKEL FILMS [J]. THIN SOLID FILMS, 1972, 12 (01) : 71 - &

[8] COMPRESSIVE STRESS AND INERT-GAS IN MO FILMS SPUTTERED FROM A CYLINDRICAL POST MAGNETRON WITH NE, AR, KR, AND XE [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1980, 17 (01): : 380 - 383

[9] HOFFMAN RW, 1976, PHYSICS NONMETALLIC, V14

[10] HOFFMAN RW, 1977, 7TH P INT VAC C VIEN, V2, P1769

[1] INTERNAL-STRESS OF THIN SILVER AND GOLD-FILMS AND ITS DEPENDENCE ON GAS-ADSORPTION [J]. THIN SOLID FILMS, 1979, 62 (02) : 195 - 208

[2] ALECK BJ, 1949, J APPL MECH-T ASME, V16, P118

[3] EFFECT OF IMPURITIES ON INTRINSIC STRESS IN THIN NI FILMS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1976, 13 (01): : 96 - 98

[4] BASCOM WD, 1978, ASTM SP640 ADHESION

[5] ENHANCED X-RAY DIFFRACTION FROM SUBSTRATE CRYSTALS CONTAINING DISCONTINUOUS SURFACE FILMS [J]. JOURNAL OF APPLIED PHYSICS, 1967, 38 (07) : 2913 - &

[6] CHOW TS, 1975, ADHESION SCI TECHNOL

[7] ORIGINS OF STRESS IN THIN NICKEL FILMS [J]. THIN SOLID FILMS, 1972, 12 (01) : 71 - &

[8] COMPRESSIVE STRESS AND INERT-GAS IN MO FILMS SPUTTERED FROM A CYLINDRICAL POST MAGNETRON WITH NE, AR, KR, AND XE [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1980, 17 (01): : 380 - 383

[9] HOFFMAN RW, 1976, PHYSICS NONMETALLIC, V14

[10] HOFFMAN RW, 1977, 7TH P INT VAC C VIEN, V2, P1769