TANTALUM SILICIDE INTERCONNECT CHARACTERIZATION BY SURFACE ANALYTICAL TECHNIQUES

被引：7

作者：

CHANG, KY

PANCHOLY, RK

机构：

来源：

APPLIED SURFACE SCIENCE | 1981年 / 9卷 / 1-4期

关键词：

D O I：

10.1016/0378-5963(81)90049-0

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

收藏

页码：377 / 387

页数：11

相关论文

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