OXIDE SUPERCONDUCTOR AND MAGNETIC METAL THIN-FILM DEPOSITION BY PULSED-LASER ABLATION - A REVIEW

被引：91

作者：

JACKSON, TJ

PALMER, SB

机构：

[1] Physics Department, University of Warwick, Coventry

来源：

JOURNAL OF PHYSICS D-APPLIED PHYSICS | 1994年 / 27卷 / 08期

关键词：

D O I：

10.1088/0022-3727/27/8/001

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A practical review of the use of laser ablation for the deposition of thin films of oxide superconductors and metals is presented. Details of the design and operation of a laser ablation deposition system are discussed, together with the influence of operating parameters such as laser wavelength and power density on the film growth, with the aim of assisting the researcher beginning to use and/or study laser ablation deposition.

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页码：1581 / 1594

页数：14

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