AN OPTICAL-FIBER THIN-FILM THICKNESS MONITOR

被引：6

作者：

CARANTO, NRY

KADDU, SC

SZAJMAN, J

MURPHY, MM

COLLINS, SF

BOOTH, DJ

机构：

[1] Dept. of Appl. Phys., Victoria Univ. of Technol., Melbourne, Vic.

来源：

MEASUREMENT SCIENCE AND TECHNOLOGY | 1993年 / 4卷 / 08期

关键词：

D O I：

10.1088/0957-0233/4/8/012

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A simple and easily calibrated thin film thickness monitor involving optical fibre components is described. Film thickness was determined by monitoring the return power via a 2 x 2 directional coupler arrangement. This optical fibre monitor was used to calibrate a conventional quartz crystal microbalance.

引用

页码：865 / 869

页数：5

共 5 条

[1]

BORN M, PRINCIPLES OPTICS, P61

[2] A SIMPLE OPTICAL THIN-FILM DEPOSITION MONITOR USING LEDS AND FIBER OPTICS [J].