MICROCRYSTALLINE DIAMOND DEPOSITION USING INERT-GAS CURTAIN COMBUSTION-FLAME METHOD

被引：5

作者：

ABE, T ^{[1
]}

SUEMITSU, M ^{[1
]}

MIYAMOTO, N ^{[1
]}

机构：

[1] TOHOKU UNIV,ELECT COMMUN RES INST,SENDAI,MIYAGI 980,JAPAN

来源：

JOURNAL OF CRYSTAL GROWTH | 1994年 / 143卷 / 3-4期

关键词：

D O I：

10.1016/0022-0248(94)90057-4

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

Inert-gas curtain combustion-flame method, in which a combustion flame of oxygen/acetylene mixture is surrounded by an inert-gas (Ar and/or He) flow to prevent mixing oxygen from the air, has been developed for the deposition of microcrystalline diamond thin films. The emission spectra from the combustion flame showed reduction in the ultraviolet region with increasing inert-gas now, indicating a suppression of the outer flame by the curtain. Highly uniform and highly dense microcrystalline films of diamonds were successfully prepared, which is understood to be caused by realization of a combustion flame with optimum radical concentrations. Morphological variations due to the choice of the inert gas have also been found.

引用

页码：206 / 212

页数：7

共 9 条

[1] FORMATION OF 250-MU-M-DIAMETER DIAMOND CRYSTALS BY COMBUSTION FLAME METHOD - EFFECTS OF PREFORMATION OF MOLYBDENUM OXIDE ON THE SUBSTRATE [J].

ABE, T ;

SUEMITSU, M ;

MIYAMOTO, N ;

SATO, N .

JOURNAL OF APPLIED PHYSICS, 1993, 73 (02) :971-976

[2] DIAMOND SYNTHESIS USING AN OXYGEN-ACETYLENE TORCH [J].

HANSSEN, LM ;

CARRINGTON, WA ;

BUTLER, JE ;

SNAIL, KA .

MATERIALS LETTERS, 1988, 7 (7-8) :289-292

[3] SYNTHESIS OF DIAMOND THIN-FILMS BY THERMAL CVD USING ORGANIC-COMPOUNDS [J].

HIROSE, Y ;

TERASAWA, Y .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1986, 25 (06) :L519-L521

[4]

Hirose Y., 1988, PROGRAM BOOK ABSTRAC, P434

[5] VAPOR-DEPOSITION OF DIAMOND PARTICLES FROM METHANE [J].

MATSUMOTO, S ;

SATO, Y ;

KAMO, M ;

SETAKA, N .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1982, 21 (04) :L183-L185

[6] EVIDENCE FOR LEDGE GROWTH AND LATERAL EPITAXY OF DIAMOND SINGLE-CRYSTALS SYNTHESIZED BY THE COMBUSTION FLAME TECHNIQUE [J].

RAVI, KV ;

JOSHI, A .

APPLIED PHYSICS LETTERS, 1991, 58 (03) :246-248

[7]

SNAIL KA, 1991, APPL PHYS LETT, V58, P29

[8] GROWTH-MECHANISM AND THE ORDER OF APPEARANCE OF DIAMOND (111) AND (100) FACETS [J].

SUN, BW ;

ZHANG, XP ;

LIN, ZD .

PHYSICAL REVIEW B, 1993, 47 (15) :9816-9824

[9] GROWTH OF DIAMOND THIN-FILMS BY DC PLASMA CHEMICAL VAPOR-DEPOSITION AND CHARACTERISTICS OF THE PLASMA [J].

SUZUKI, K ;

SAWABE, A ;

INUZUKA, T .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1990, 29 (01) :153-157

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