COMPUTER SIMULATION OF SPUTTERING

被引：9

作者：

OSTRY, D

MACDONALD, RJ

机构：

来源：

PHYSICS LETTERS A | 1970年 / A 32卷 / 05期

关键词：

D O I：

10.1016/0375-9601(70)90515-3

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

收藏

页码：303 / +

页数：1

相关论文

共 6 条

[1] ADDITIONAL INFORMATION ON COMPUTER SIMULATION OF SPUTTERING [J].

HARRISON, DE .

JOURNAL OF APPLIED PHYSICS, 1969, 40 (09) :3870-&

[2] COMPUTER SIMULATION OF SPUTTERING [J].

HARRISON, DE ;

LEVY, NS ;

JOHNSON, JP ;

EFFRON, HM .

JOURNAL OF APPLIED PHYSICS, 1968, 39 (08) :3742-&

[3] STRUCTURES OF CLEAN SURFACES OF GERMANIUM AND SILICON .1. [J].

LANDER, JJ ;

MORRISON, J .

JOURNAL OF APPLIED PHYSICS, 1963, 34 (05) :1403-&

[4] Sputtered atom ejection patterns from (100) Ge surfaces [J].

MacDonald, R. J. .

PHILOSOPHICAL MAGAZINE, 1970, 21 (171) :519-531

[5] ROLE OF FOCUSING COLLISIONS IN SPUTTERING [J].

NELSON, RS ;

VONJAN, R .

CANADIAN JOURNAL OF PHYSICS, 1968, 46 (06) :747-&

[6] COMMENTS ON COMPUTER SIMULATION OF SPUTTERING [J].

ROBINSON, MT .

JOURNAL OF APPLIED PHYSICS, 1969, 40 (06) :2670-&