CHEMICAL MAPPING AND ITS APPLICATION TO INTERFACES, POINT-DEFECTS AND MATERIALS PROCESSING

被引:15
作者
OURMAZD, A
机构
[1] AT and T Bell Laboratories, Holmdel
[2] AT and T Bell Laboratories, Holmdel
来源
MATERIALS SCIENCE REPORTS | 1993年 / 9卷 / 06期
关键词
D O I
10.1016/S0920-2307(93)90009-4
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
This review has two primary aims. First, it describes how the composition of materials may be quantitatively mapped with near-atomic resolution and sensitivity. Second, it outlines how this capability may be used to investigate important solid-state phenomena at the microscopic level. Specifically, the following topics are considered: interfacial roughness in semiconductor heterostructures and its effect on the optical properties of quantum wells; stability of modern interfaces against interdiffusion during typical annealing treatments; diffusion of intrinsic point defects in semiconductors; and the microscopics of ion implantation.
引用
收藏
页码:201 / 250
页数:50
相关论文
共 61 条
[1]   ELECTRONIC-STRUCTURE, TOTAL ENERGIES, AND ABUNDANCES OF THE ELEMENTARY POINT-DEFECTS IN GAAS [J].
BARAFF, GA ;
SCHLUTER, M .
PHYSICAL REVIEW LETTERS, 1985, 55 (12) :1327-1330
[2]   QUANTITATIVE CHEMICAL MAPPING - SPATIAL-RESOLUTION [J].
BAUMANN, FH ;
BODE, M ;
KIM, Y ;
OURMAZD, A .
ULTRAMICROSCOPY, 1992, 47 (1-3) :167-172
[4]   CATHODOLUMINESCENCE ATOMIC SCALE IMAGES OF MONOLAYER ISLANDS AT GAAS/GAALAS INTERFACES [J].
BIMBERG, D ;
CHRISTEN, J ;
FUKUNAGA, T ;
NAKASHIMA, H ;
MARS, DE ;
MILLER, JN .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1987, 5 (04) :1191-1197
[5]  
BODE M, 1990, MATER RES SOC SYMP P, V157, P197
[6]  
CAHN JW, 1961, ACTA METALL, V9, P525
[7]   INTERDIFFUSION BETWEEN GAAS AND ALAS [J].
CHANG, LL ;
KOMA, A .
APPLIED PHYSICS LETTERS, 1976, 29 (03) :138-141
[8]   PROPERTIES OF VACANCY DEFECTS IN GAAS SINGLE-CRYSTALS [J].
CHIANG, SY ;
PEARSON, GL .
JOURNAL OF APPLIED PHYSICS, 1975, 46 (07) :2986-2991
[9]   EFFECT OF GRADIENT ENERGY ON DIFFUSION IN GOLD-SILVER ALLOYS [J].
COOK, HE ;
HILLIARD, JE .
JOURNAL OF APPLIED PHYSICS, 1969, 40 (05) :2191-+
[10]  
Crank J., 1989, MATH DIFFUSION